High-Permittivity Dielectrics And High Mobility Semiconductors For Future Scaled Technology: Hf-Based High-K Gate Dielectrics And Interface Engineering For Hfo₂/Ge Cmos Device
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High-Permittivity Dielectrics And High Mobility Semiconductors For Future Scaled Technology: Hf-Based High-K Gate Dielectrics And Interface Engineering For Hfo₂/Ge Cmos Device